Quasi-monolithic planar load cells using built-in resonant strain gauges
نویسندگان
چکیده
منابع مشابه
Nonlinearity and Hysteresis of Resonant Strain Gauges
Nonlinearity and hysteresis effects of electrostatically activated, voltage driven resonant microbridges have been studied theoretically and experimentally. It is shown, that, in order to avoid vibration instability and hysteresis to occur, the choices of the ax . and d.c. driving voltages and of the quality factor of a resonator, with a given geometry and choice of materials, are limited by a ...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 1993
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/3/4/006